Sebopego sa Wafer ya Quartz
Quartz Wafer Substrates ke diwafers kudukudu tšeo di dirilwego ka quartz ya bohlweki bjo bo phagamego - (SiO2), yeo e šomišwago kudu ka go di-semiconductors, optoelectronics, micro-electromechanical systems (MEMS), didirišwa tša optical, le mašemo a mangwe.
Tlhalošo
Dithoto tša Dilo tše di bonagalago
- Bohlweki bjo bo Phagamego: .Ka tlwaelo e dirilwe go tšwa go quartz ya maitirelo (mohlala, silika ye e kopantšwego), ka bohlweki bjo bo phagamego kudu ( Bogolo go feta goba bjo bo lekanago le 99.99%) le ditšhila tše nnyane go efoga go ama tshepedišo ya sedirišwa.
- Botsitso bja Mogote: .Low segokanyipalo sa katoloso mogote (≈0.55 × 10−/℃) le phahameng - mocheso ho hanyetsa (nolofatsa ntlha ~ 1600 tekanyo ), loketseng bakeng sa phahameng - mocheso dithulaganyo.
- Tiragatšo ya Optical: .Broad phetiso fapaneng (UV ho IR), le ikhethang UV phetiso, loketseng bakeng sa photomask, lilense, joalo-joalo.
- Go se šome ga Dikhemikhale: .E lwantšha diesiti le di-alkali (ntle le esiti ya hydrofluoric), e loketše ditshepedišo tša go etšwa ka go kolobiša.
- Insulation ya Motlakase: .High resistivity (>1016 Ω·cm), e loketšego go thibela disubstrate goba didirišwa tša maqhubu a godimo -.
Ditirišo
Tšweletšo ya Semiconductor
- Disubstrate tša photomask
- Dikarolo tša lithography tša EUV
- Bajari ba tshepedišo ya wafer
Photonics & Optoelektroniki
- Disubstrate tša maphoto a optical
- Laser diode ntseng bo eketseha
- Dikarolo tša khomphutha ya quantum
Ditirišo tše di Kgethegilego
- Metheo ya resonator ya MEMS
- Optics ya thelesekoupu ya sebaka
- Ditshepedišo tša laser tša maatla a godimo-
Tshepetšo ya Tšweletšo
- Tlhamo ya Didirišwa tše Tala: .E tšweleditšwe ka go bewa ga mouwane (mohlala, SiCl4 oxidation) goba tlhwekišo ya quartz ya tlhago.
- Go Qhibidiga le go Bopa: .Go qhibidiga ga themperetšha ya godimo-go latelwa ke go fodiša go ba di-ingot goba go goga thwii ka gare ga dithupa.
- Go sega: .Sliced ka tšesaane wafers sebelisa taemane terata saw kapa tham mong bang laser seha.
- Go šila le go Poliša: .Dikhemikhale mochine polishing (CMP) finyella nanometer - boemo boreleli.
- Go Hlwekiša le go Hlahloba: .Go tlošwa ga dikarolwana le ditšhila tša tšhipi, gomme gwa latela teko ya sefoa le ya paramethara.
Dithoto
|
Dithoto tša Mmele |
Ditekanyetšo |
|
Bohlweki |
＞99.99% |
|
Kitlano |
2.2g / cm3 |
|
Go ba pepeneneng |
＞90% |
|
Mohs Go thatafala |
5.5--6.5 |
|
Ntlha ya Deformation |
1280 tekanyo e |
|
Ntlha ya go Nolofatša |
1750 tekanyo e |
|
Ntlha ya go Hlatswa |
1250 tekanyo e |
|
Mogote o Itšego (20 - 350 tekanyo ) . |
670J / kg. tikrii |
|
Mogote Conductivity (20 tekanyo ) . |
1.4W / m . tikrii |
|
Mocheso Conductivity (w / mk, 1000 tekanyo e ) . |
1.0-1.2 |
|
Tšhupetšo ya go Kgopamiša |
1.4585 |
|
Segokanyipalo sa Katološo ya Mogote |
5.510 -7cm / cm. tikrii |
|
Hot - sebetsa Thempheretšha |
1750--2050 tekanyo ya |
|
Thempheretšha ya Tirelo ya nako ye kopana ya - |
1450 tekanyo e |
|
Thempheretšha ya Tirelo ya nako ye telele ya - |
1100 tekanyo e |
|
Dithoto tša Dikhemikhale |
Ditekanyetšo |
|
E thibela esiti |
Acid e matla(ntle le HF),Alkali e matla, tharollo ya manyolo |
|
Dithemperetšha tše di phagamego E thibela tšhilafalo |
Gabotse kudu |
|
Diteng tša Tšhila ya Tšhipi |
<5 ppm ya |
|
Dithoto tša Mohlagase |
Ditekanyetšo |
|
Go ganetša |
7107Ω.cm e le |
|
Matla a Insulation |
250 ~ 400Kv / cm |
|
Dielectric Constant ya go se fetoge |
3.7~3.9 |
|
Dielectric Monya Segokanyipalo |
＜410-4 |
|
Segokanyipalo sa Tahlegelo ya Dielectric |
＜110-4 |
|
Dithoto tša Metšhene |
Ditekanyetšo |
|
Matla a Kgateletšo |
1100MPa ya go swana le |
|
Matla a go koba |
67MPa |
|
Matla a go goga |
48MPa |
|
Tekanyo ya Poisson |
0.14~0.17 |
|
Modulus wa Young |
72000MPa e le nngwe |
|
Modulus wa go kuta |
31000MPa e le |
FAQ
Q1: Ke eng palo e kahodimodimo quartz wafer substrates boholo bo fumanehang?
A: Tšweletšo ya maemo go fihla go bophara bja 300mm, ka diprototype tša 450mm tšeo di hwetšagalago bakeng sa R&D.
Q2: Na o ka fana ka customized botenya diprofaele?
A: Ee - re ka tšweletša:
- Wedged wafers (bakeng sa dikopo tham mong bang laser) .
- Meralo ya tapered ya go nepagala
- Mesa-bokagodimo bjo bo rulagantšwego
Q3: Ke protocol efe ya go hlwekiša yeo o e kgothaletšago?
A: Standard RCA hloekileng tshebetso:
1. Go tlošwa ga organic (H2SO4: H2O2) .
2. Ho hloekisa ionic (HCl: H2O2) .
3. HF-ya mafelelo bakeng sa bokagodimo bja hydrophilic
Dithegi tše di fišago .: quartz wafer substrate, China quartz wafer substrate bahlahisi, bafepedi, fektheri
Romela potšišo .
O ka rata gape .
