quartz wafer substrate .
Quartz wafer substrates ke wafers haholo-holo entsoeng ka phahameng-bohloeki quartz (SIO2), haholo sebediswa ka semiconductors, optoelectronics, micro-electromechanical dithulaganyo (MEMS), disebediswa Optical, le masimo a mang. Ka tlase ke matseno a feletšego a disubstrate tša quartz wafer .
Tlhalošo
Dithoto tša dilo tše di bonagalago .
(1) High bohloeki : ka go tlhaolega entsoeng ka maiketsetso quartz (mohlala, fused silika), le bohloeki bo phahameng ka ho fetisisa ( e khōlō ho feta kapa lekana le 99.99%) le litšila tse nyenyane ho qoba ho ama tshebetso sesebediswa.
(2) Botsitso ba mogote : segokanyipalo se tlase sa katoloso ya mogote (≈0.55 × 10⁶/℃) le ho hanyetsa mocheso o phahameng (ntlha e boletsoeng ~ 1600 tekanyo ), e loketseng bakeng sa dithulaganyo tsa thempereichara e phahameng.
(3) Optical tshebetso : Broad phetiso fapaneng (UV ho IR), le ikhethang UV phetiso, loketseng bakeng sa photomasks, lilense, joalo-joalo.
(4) Go se šome ga dikhemikhale : go lwantšha diesiti le di-alkali (ntle le esiti ya hydrofluoric), yeo e loketšego ditshepedišo tša go etšwa ka go kolobiša.
(5) Electrical Insulation : High resistivity (>101⁶ ω·cm), e loketšego go thibela disubstrate goba didirišwa tša maqhubu a godimo.
Ditirišo .
Tšweletšo ya Semiconductor .
Di-substrate tša photomask .
Dikarolo tša Euv Lithography .
bajari ba go šoma ka wafer .
Photonics le Optoelectronics .
Optical waveguide substrates .
Laser diode mounting .
Dikarolo tša khomphutha ya quantum .
Ditirišo tše di kgethegilego .
MEMS metheo ya resonator .
Space Telescope Optics .
Ditshepedišo tša laser tša matla a magolo .
Tshepetšo ya tšweletšo .
1 Tlhagišo ya didirišwa tše tala : E tšweleditšwe ka go bewa ga mouwane (mohlala, SICL2 oxidation) goba tlhwekišo ya quartz ya tlhago.
2 Go qhibidiga le go bopa : Go qhibidiga ga themperetšha ya godimo go latelwa ke go fodiša ka gare ga di-ingot goba go thala ka go lebanya ka gare ga dithupa.
3 Go sega : E segwa ka di-wafer tše sesane o diriša disaga tša terata ya taemane goba go sega ka laser.
4 Go šila le go phopholetšwa : Go phopholetšwa ga motšhene ka dikhemikhale (CMP) go fihlelela boreledi bja maemo a nanometer.
5 Go hlwekiša le go hlahloba : Go tlošwa ga dikarolwana le ditšhila tša tšhipi, gomme gwa latela diteko tša phošo le paramethara.
Dithoto
|
Dithoto tša mmele . |
Ditekanyetšo . |
|
Go hlweka . |
＞99.99% |
|
Kitlano |
2.2g / cm .3 |
|
Go ba pepeneneng . |
＞90% |
|
Go thatafala ga mohs . |
5.5--6.5 |
|
Ntlha ya go senyegelwa ke sebopego . |
1280 tekanyo ya . |
|
Ntlha ya go nolofatša . |
1750 tekanyo ya . |
|
Ntlha ya go tšhuma . |
1250 tekanyo ya . |
|
Mogote wo o itšego (20 - 350℃) . |
670j/kg. tikrii |
|
Go swara phišo (20℃) . |
1.4W/m. tikrii |
|
Mocheso conductivity (w / mk,1000 tekanyo ) . |
1.0-1.2 |
|
Tšhupetšo ya Refractive . |
1.4585 |
|
Segokanyipalo sa katoloso ya mogote . |
5.510 -7CM / CM . tikrii |
|
Hot - Thempheretšha ya go šoma . |
1750 ~ 2050 tekanyo e . |
|
Nako e kopana - Thempheretšha ya tirelo ya nako . |
1450 tekanyo ya . |
|
Thempheretšha ya tirelo ya nako ye telele - . |
1100℃. |
|
Dithoto tša dikhemikhale . |
Ditekanyetšo . |
|
Esiti e lwantšhago . |
Esiti e matla(ntle le HF), alkali e matla, tharollo ya manyolo . |
|
Dithemperetšha tše di phagamego di thibela go tšhungwa . |
Gabotse kudu |
|
Diteng tša ditšhila tša tšhipi . |
(letlapana le 5 ppm . |
|
Dithoto tša mohlagase . |
Ditekanyetšo . |
|
Go ganetša go ganetša . |
7107ω.cm . |
|
Matla a go thibela go tsena ga moya . |
250 ~ 4 0 0 0 r k V / c m . |
|
Dielectric kamehla . |
3.7~3.9 |
|
Dielectric absorption segokanyipalo . |
＜410-4 |
|
Dielectric tahlehelo segokanyipalo . |
＜110-4 |
|
Dithoto tša metšhene . |
Ditekanyetšo . |
|
Matla a go gatelela . |
1100MPA . |
|
Matla a go koba . |
67MPA . |
|
Matla a go goga . |
48MPA . |
|
Tekanyo ya Poisson . |
0.14~0.17 |
|
Modulus ya Young . |
72000MPA . |
|
Modulus ya go kuta . |
31000MPA . |
Ke ka baka la’ng o re kgetha:
Tlwaetšo: .
Tlwaetša ditšweletšwa tša gago go ya ka dinyakwa tša gago .
24 Tirelo ya Inthaneteng:
Tshepetšo ditshwayotshwayo tša gago ka nako .
Theko ya phadišano: .
Theko ya fektheri eupša ya maemo a godimo .
Thomelo ya Lefase ka Bophara:
Go romelwa ga ntlo le ntlo .
FAQ .
Q1: Ke boholo ba substrates ba palo e kahodimodimo ya quartz wafer e fumanehang?
A: Tšweletšo ya maemo go fihla go bophara bja 300mm, ka diprototypes tša 450mm tše di lego gona bakeng sa R&D.
Q2: Na o ka fana ka diprofaele tša botenya bjo bo rulagantšwego?
A: Ee, re ka tšweletša:
Wedged wafers (bakeng sa dikopo laser) .
Meralo ya Tapered ya go Nepagala .
Bokagodimo bjo bo rulagantšwego bja Mesa .
Q3: Ke protocol efe ya go hlwekiša yeo o e kgothaletšago?
A: Standard RCA hloekileng tshebetso: .
1. Go tlošwa ga organic (H2So₄: H2o2) .
2. Go hlwekiša ga ionic (HCl: H2o2) .
3. HF-la mafelelo bakeng sa bokagodimo bja hydrophilic .
Dithegi tše di fišago .: Quartz Wafer Substrate, China Quartz Wafer Substrate bahlahisi, bafepedi, fektheri
Romela potšišo .
O ka rata gape .
